Metrology, inspection, and process control for microlithography XXIII (23-26 February 2009, San Jose, California, United States)Allgair, John Alexander; Raymond, Christopher J.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 2 vol, 2, isbn 978-0-8194-7525-1 0-8194-7525-4Conference Proceedings

MOSAIC: a new wavefront metrologyANDERSON, Christopher N; NAULLEAU, Patrick P.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 72720B.1-72720B.7, 2Conference Paper

Special Issue on Laser Ablation: Creation of Nanomaterials and Pulsed Laser Deposition PLDESCOBAR-ALARCON, L; NIINO, H; ZHU, X et al.Applied physics. A, Materials science & processing (Print). 2013, Vol 110, Num 4, issn 0947-8396, 227 p.Serial Issue

Ad-hoc design of temporally shaped fs laser pulses based on plasma dynamics for deep ablation in fused silicaHERNANDEZ-RUEDA, J; SIEGEL, J; PUERTO, D et al.Applied physics. A, Materials science & processing (Print). 2013, Vol 112, Num 1, pp 185-189, issn 0947-8396, 5 p.Article

Laser Cutting for Slotted Oil PipesHE CHANGYU.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 6722, pp 672240.1-672240.7, issn 0277-786X, isbn 978-0-8194-6879-6 0-8194-6879-7, 2Conference Paper

VUV and UV excilamps and their applicationsTARASENKO, Victor F; SOSNIN, Edward A.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6326-4, 2Vol, vol2, 626136.1-626136.10Conference Paper

Laser modification of structure and properties of glass-ceramicsVEIKO, V. P; KIEU, Q. K; NIKONOROV, N. V et al.SPIE proceedings series. 2004, pp 250-257, isbn 0-8194-5247-5, 8 p.Conference Paper

Laser generated TiC reinforced with Fe-Al matrix composite layer on Al-Si alloyVISWANATHAN, A; SASTIKUMAR, D; KUMAR, Harish et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66660R.1-66660R.10, issn 0277-786X, isbn 978-0-8194-6814-7Conference Paper

Laser engraving of paper and polymeric materials for tactile detectionRAMOS-DE-CAMPOS, Jose A; GAMO, Javier; SORIANO, Carlos et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7131, issn 0277-786X, isbn 978-0-8194-7365-3 0-8194-7365-0, 71311T.1-71311T.8Conference Paper

New Inspection Technology for Hole Pattern by Fourier Space on hp 4x-nm GenerationKAWAI, Akitoshi; HAYANO, Fuminori; ENDO, Kazumasa et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 727219.1-727219.8, 2Conference Paper

Development of a Novel Methodology for Effective Partial die Inspection and MonitoringLEE, Byoung-Ho; LEE, Tae-Yong; CROSS, Andrew et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 72723K.1-72723K.6, 2Conference Paper

Combustion-augmented laser ramjetsHORISAWA, Hideyuki; TAMADA, Kazunobu; KIMURA, Itsuro et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6326-4, 2Vol, vol2, 62612M.1-62612M.10Conference Paper

Pulsed femtosecond laser-target momentum coupling in the high-intensity regimeHAMMERLING, P; REMO, J. L.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6326-4, 2Vol, vol2, 62612L.1-62612L.14Conference Paper

Laser applications in microelectronic and optoelectronic manufacturing XV (25-28 January 2010, San Francisco, California, United States)Niino, Hiroyuki.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7584, issn 0277-786X, isbn 978-0-8194-7980-8 0-8194-7980-2, 1Vol, various pagings, isbn 978-0-8194-7980-8 0-8194-7980-2Conference Proceedings

Laser polishing of vidicon's glass substratesSIDORENKO, S. P; FEDOSOVSKY, M. E; VEIKO, V. P et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7201, issn 0277-786X, isbn 978-0-8194-7447-6, 72011I.1-72011I.7Conference Paper

Implementation of Multiple ROI with single FOV for advanced mask metrologyJEONG, Kyu-Hwa; FREZGHI, Hatsey; TAVASSOLI, Malahat et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 72724D.1-72724D.9, 2Conference Paper

Laser welding of micro plastic partsHABERSTROH, E; HOFFMANN, W.-M.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 645903.1-645903.8, issn 0277-786X, isbn 978-0-8194-6572-6, 1VolConference Paper

Soft X-ray lasers and applications VI (2-3 August 2005,San Diego, California, USA)Fill, Ernst E.Proceedings of SPIE, the International Society for Optical Engineering. 2005, issn 0277-786X, isbn 0-8194-5924-0, 1Vol, Pagination multiple, isbn 0-8194-5924-0Conference Proceedings

Fabrication Methods for the Manufacture of Sapphire MicropartsALLEN, David M; REDONDO, Roxana; DANY, Maximilien et al.Symposium on design, test, integration and packaging of MEMS-MOEMS. 2011, pp 29-34, isbn 978-2-355-00013-3, 1Vol, 6 p.Conference Paper

Fast Analysis and Diagnostics for Improving Overlay Control - Moving Beyond the Black Box ApproachLIU, Yi-An; WU, Wei-Ming; LIN, Hsiao-Chiang et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 72722Z.1-72722Z.7, 2Conference Paper

Laser soldering of enameled wiresBÖHM, S; HEMKEN, G; NOACK, K et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7202, issn 0277-786X, isbn 978-0-8194-7448-3, 72020J.1-72020J.7Conference Paper

Laser-based micro bonding using hot melt adhesivesHEMKEN, G; BÖHM, S.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7202, issn 0277-786X, isbn 978-0-8194-7448-3, 72020I.1-72020I.9Conference Paper

Optoelectronic Packaging based on Laser JoiningEBERHARDT, Ramona; BECKERT, Erik; BURKHARDT, Thomas et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 68800G.1-68800G.10, issn 0277-786X, isbn 978-0-8194-7055-3Conference Paper

Application of Mössbauer spectroscopy in the studies of oxidation of steelAMULEVICHIUS, A; MAZHEIKA, K; SIPAVICHIUS, Ch et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 67350Y.1-67350Y.4, issn 0277-786X, isbn 978-0-8194-6893-2Conference Paper

Immersion Specific Error Contribution to Overlay ControlD'HAVE, Koen; LAIDLER, David; CHENG, Shaunee et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 72720D.1-72720D.6, 2Conference Paper